JEOL JSPM-5200 Instructions Manual page 367

Cross-sectional information
The results of various analyses on the line plot are displayed. The kinds of analyses and
the analysis methods are shown below.
• Definition
A line plot is defined as follows.
z
The height z along an arbitrary length l in the line plot is defined as
The height Z
• Average roughness (Ra)
Uses the equation for computing the arithmetic average roughness Ra stipulated by
JIS B0601.
Ra is stipulated as the "value expressed by the following equation when the center-
line is taken as the X-axis and a line plot is expressed as f (x)".
Centerline
• Root mean square roughness (Rq)
Stipulated as the "root mean square of the deviation from the centerline".
• 10-point average roughness (Rzjis)
Uses the equation for computing the 10-point average roughness Rz stipulated in
JIS B0601:1998.
(The 10-point average roughness itself is not stipulated in JIS B0601:2001.)
TMPM5200-2
Line plot
Length of line plot L
at the centerline is defined as follows.
0
=
Z
0
Z
=
R
a
1
=
Rq
L
z =
f ) (l
1
L
∫
f ) ( l dl
L
0
|f(x)|
L
1
L
∫
f ( x ) dl
L
0
L
( )
∫
2
−
) (
f l Z dl
0
0
６ ANALYSIS OPERATION
Centerline
Ra
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