1.1
INTRODUCTION.................................................................................. 1-1
2.1
2.2
COMPOSITION..................................................................................... 2-2
2.3
2.4
3.1
3.2
MAIN UNIT........................................................................................... 3-2
3.2.1
3.2.2
3.3
OPERATION UNIT ............................................................................. 3-13
3.3.1
3.3.2
3.3.3
4.1
4.1.1
4.1.2
4.1.3
4.1.4
4.1.5
4.1.6
4.1.7
4.1.8
4.1.9
4.2
4.2.1
4.2.2
4.2.3
5.1
5.1.1
5.1.2
5.1.3
TMPM5200-2
CONTENTS
SPM Unit......................................................................................... 3-2
AFM Amplifier ............................................................................... 3-9
Computer System .......................................................................... 3-16
Outline............................................................................................. 4-1
Mounting the Tip............................................................................. 4-6
the SPM Head Unit ......................................................................... 4-7
Specimen Exchange ........................................................................ 4-9
Rough Approaching ...................................................................... 4-17
Before use........................................................................................ 5-1
Glossary........................................................................................... 5-1
C-1
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