Checking The Stage Position - JEOL JSPM-5200 Instructions Manual

５ MEASUREMENT OPERATION
5.3.5

Checking the Stage Position

In the WinSPM system, the approach operation is done automatically by a motor. An
approach cannot be performed when the Z stage has already risen to the top position.
Befo re performing
approachable range by means of the following procedu
Observe the Z s
Parameters
distance betwee
5-22
an approach, confirm th
tage positio n indicato
window . Make sure that the position of the stage is 1/4 of the
n In a nd Out.
at the position o f the Z
re.
r (△) in the lower section of t
stage i s in the
he SPM
TMPM5200-2