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BASIC Step-by-Step Instructions for JEOL 6060LV
Version 4/13/11
General Operation
1. Check System: Pumps running and EVAC light green (main panel near key switch)?
If not notify a staff member.
2. If the SEM software is not running, start SEM Software (SEM Main Menu icon). It
takes several minutes to start, be patient. If you need to log into computer use the
account (USER:jeol;PASSWORD:jeol). Please do not log into other accounts. Use
portable media, ftp, or UIUC NetFiles to transfer your data.
3. Prepare your samples before venting! Please keep the area clean, organized, and wear
GLOVES!! Anything that goes in the vacuum should be clean and handled only with
gloves or tweezers; keep the vacuum clean.
4. Press the Sample
5. Press the Vent button; it takes a couple minutes to vent.
6. When Vent light stops blinking (main panel near key switch), slide open stage
drawer.
button on toolbar.
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Summary of Contents for JEOL 6060LV
- Page 1 2. If the SEM software is not running, start SEM Software (SEM Main Menu icon). It takes several minutes to start, be patient. If you need to log into computer use the account (USER:jeol;PASSWORD:jeol). Please do not log into other accounts. Use portable media, ftp, or UIUC NetFiles to transfer your data.
- Page 2 7. Slide sample holder onto stage dovetail. Note proper direction to slide on “dovetail” relative to step on stage platform. 8. Adjust sample height (Working Distance) using height gauge. 10 mm is the EDS working distance. Bottom end of ruler corresponds to the working distance (see photo).
- Page 3 9. Specimen tilting is limited by working distance and specimen diameter. The IR chamber-scope must be used for sample tilting and Z adjustment to verify that safe clearance with detectors, etc. is maintained. Safe clearance is at least 5mm distance on LCD monitor.
- Page 4 15. Set the Signal to SEI , if not already (You can change it to BEIW, if desired later). 16. Click the HT Ready icon to turn on the High Voltage, now should be Some intensity should be seen in the image window. If not press View .
- Page 5 e. Manually check filament saturation. This is best done at a higher spot size setting (40-60) and a high contrast setting. Click the Filament Heating down arrow (left side of slider control) several times until you see the average brightness decrease somewhat. Click the Filament Heating up arrow one step at a time while noting the change in brightness.
- Page 6 running auto alignment first select an area on the sample or sample holder that has homogeneous brightness at moderate magnification (1-5 kx) to get the best beam alignment. 18. Select a spot size, usually initially between 30 and 40. Click get dialog box with slider control.
- Page 7 c. Hint: For easier operation, in HV mode, use the SEI detector to set up the instrument and focus, etc. Switch to the BEIW mode mostly to look at or record slow scan images. d. If you are working at high magnification, select a smaller spot size for a sharper image.
- Page 8 Changing Samples or Ending Your Session 1. Turn off the High Voltage (click HT On control on main panel, it should change to HT ready 2. Wait 2 minutes!! 3. Press the Sample button on toolbar. 4. Press the Vent button; it takes a couple minutes to vent. 5.
- Page 9 Aligning the Objective Aperture 1. This procedure needs done if the image shifts in any direction when going through focus. 2. Center a distinct feature in the field of view (>5000x) 3. Select Wobb (the image should now modulate in focus) and Scan1 is automatically selected 4.
- Page 10 5. If the image is not sharp enough, try decreasing the spot size, and verify the sample is at a working distance of 8-10mm. Also lower kV operation will yield slightly poorer resolution. Manually Adjusting Brightness and Contrast 1. Deselect Stig on Knob Panel if lit green 2.
- Page 11 c. SHADOW (a+b+c) – image with strong oblique component, image similar to SEI but with BSE, needed for LV mode where SEI detector does not function The Solid State BSE detector is fairly “slow”, therefore at fast scan speeds the image is “blurred”...
- Page 12 Changing the Vacuum Mode LV mode is generally used to observe and analyze non-conducting sample without the need for a conductive coating (Au/Pd or C). 1. Turn off the Beam, i.e. Click 2. Click Vac. Mode A dialog box confirming the change of mode should appear. 3.
- Page 13 Release the button then press it again to restart the computer. (USER:jeol;PASSWORD:jeol). This should fix nearly all problems unless there was an actual failure.
- Page 14 JEOL 6060LV GUI Menu bar When each menu is clicked, a pull-down menu is indicated. If you click a pull-down menu, the various operation and setup dialog can be executed and/or displayed. Text icons When each icon button is clicked, switching of the scan mode, auto-function is started, or an operation window is displayed.
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