Installing An Extended Capacity Turbomolecular Pump - Thermo Scientific ISQ 7000 Hardware Manual

Installing an Extended Capacity Turbomolecular Pump

Thermo Scientific
The extended capacity turbomolecular pump is a multi-stage axial-flow turbine in which high
speed rotating blades provide compression by increasing the probability of gas molecules
moving in the pumping direction. The extended capacity turbomolecular pump is optimized
for molecular flow conditions and requires the use of a rough pump to exhaust to atmosphere.
 To install or replace an extended capacity turbomolecular pump
1. Shut down your system by following the steps in
page 109.
2. Use a T20 Torxhead screwdriver to loosen the top cover panel screws from the interior
front panel. Then lift the top cover panel off the instrument.
3. Use a T20 Torxhead screwdriver to remove the screw at each outside corner of the right
side panel.
Figure 461. Removing the Right Side Panel
4. Make sure the electrometer board cable is not in the way when you remove the power
supply system.
"Shutting Down the ISQ System"
Right Side Panel Screws
4
Upgrade Equipment
Turbomolecular Pumps
on
ISQ 7000 Hardware Manual 401