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5. Disconnect the power cables from the back of the instrument.
Figure 457. Disconnecting the Power Cables
Screws
Power Cable
Connectors
6. Use a T20 Torxhead screwdriver to remove the two screws holding the power supply
system to the top of the back panel.
7. Grasp the power supply system and lift it out of the instrument. It fits snugly, so you may
have to gently shake it as you lift it out.
8. Disconnect the turbo pump cable from the distribution board.
Figure 458. Disconnecting the Turbo Pump Cable From the Distribution Board
9. Remove the clamp that connects the foreline adapter to the turbo pump.
4
Upgrade Equipment
Turbomolecular Pumps
Turbo Pump
Cable
Connector
ISQ 7000 Hardware Manual
397
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