Turbomolecular Pumps; Installing A Standard Capacity Turbomolecular Pump - Thermo Scientific ISQ 7000 Hardware Manual

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Upgrade Equipment

Turbomolecular Pumps

Turbomolecular Pumps

Installing a Standard Capacity Turbomolecular Pump

396 ISQ 7000 Hardware Manual
There are two types of turbomolecular pumps available — a standard capacity and an
extended capacity. We use low maintenance turbo pumps that should give you several years of
service. Consult your turbo pump documentation for recommended service intervals.
The standard capacity turbomolecular pump combines bladed turbomolecular stages with
molecular drag stages on the same rotor. This design allows for operation even with high
foreline pressures.
 To replace or install a standard capacity turbomolecular pump
1. Shut down your system by following the steps in
page 109.
2. Use a T20 Torxhead screwdriver to loosen the top cover panel screws from the interior
front panel. Then lift the top cover panel off the instrument.
3. Use a T20 Torxhead screwdriver to remove the screw at each outside corner of the right
side panel.
Figure 456. Removing the Right Side Panel
4. Make sure the electrometer board cable is not in the way when you remove the power
supply system.
"Shutting Down the ISQ System"
Right Side Panel Screws
on
Thermo Scientific