Thermo Scientific
9. Remove the repeller plate and insulating spacers
Figure 168. Removing the Repeller Plate and Insulating Spacers
Insulating
Spacers
10. Use a T10 Torxhead screwdriver to remove the two screws holding the gas mixing
chamber and tubing to the ion source block.
11. Use a T20 Torxhead screwdriver to remove the two screws connecting the lens/source
heater to the ion source block.
Figure 169. Disconnecting the Lens/Source Heater
Replacing Components of the Ion Source
Repeller Plate
ISQ 7000 Hardware Manual
3
Advanced Maintenance
Lens/Source
Heater
Screws
189