Judgement Condition (Calc Axis Move By Multipoint) - Omron FH-3 Series Reference Manual

Judgement Condition (Calc Axis Move by Multipoint)

This item specifies the condition for measurement results.
1
In the Item Tab area, click [Judgement condition].
2
In the "Judgement condition" area, set
each item.
Setting item
X/Y-axis movement
Error max.
The following parameters are displayed in this menu based on the stage type.
Displayed content
X axis movement
amount
Judgement upper/lower
limit values
Y axis movement
amount
Judgement upper/lower
limit values
θ axis angle movement
amount
Judgement upper/lower
limit values
θ axis linear movement
amount
Judgement upper/lower
limit values
U axis movement
amount
Judgement upper/lower
limit values
804
Calc Axis Move by Multipoint
Setting value
[Factory default]
[-99999.9999] to
[99999.9999]
0 to 99999.9999
[99999.9999]
Not
θXY
XY XYθ
selected
  
  
*1
  
*2

 
  
If the reference data is the UVWR stage
Description
Used to set upper and lower limit values for the movement
amount in the axis direction.
The axes that can be set will vary according to the
processing item containing the external device information
specified by [Machine setting].
This setting is enabled when [Measure type] in the [Calc.
parameter] tab is set to [Points alignment].
It is used to set the upper and lower limit values for the
difference between the points at which the difference
between the reference position and measurement position
is a maximum.
UVW UVWR X(Y)
 
 
 
 
*1
   
*2

  
 
 
FH/FZ5 Processing Item Function Reference Manual
Xθ(Yθ) θX(θY) 3 axes 4 axes
   
   
*1 *1
   
*2 *2
 
 
   