Omron FH-3 Series Reference Manual page 781

If the stage type of the reference data is
the UVW stage
Setting item
U-axis
V-axis
W-axis
If the stage type of the reference data is
the UVWR stage
Setting item
U-axis
V-axis
W-axis
R-axis
Selects X-axis as movement axis when
X(Y) Stage is set in reference data.
Setting item
X-axis
Selects Y-axis as movement axis when
X(Y) Stage is set in reference data.
Setting item
Y-axis
Selects X-axis as movement axis when
Xθ(Yθ) or θX(θY) Stage are set in
reference data.
Setting item
X-axis
θ-axis
FH/FZ5 Processing Item Function Reference Manual
Setting value
[Factory default]
- Set how far the U axis position moved from the origin.
- Set how far the V axis position moved from the origin.
- Set how far the W axis position moved from the origin.
Setting value
[Factory default]
- Set how far the U axis position moved from the origin.
- Set how far the V axis position moved from the origin.
- Set how far the W axis position moved from the origin.
- Set how far the R axis position moved from the origin.
Setting value
[Factory default]
- Set the measurement distance of X-axis from homign operation.
Setting value
[Factory default]
- Set the measurement distance of Y-axis from homign operation.
Setting value
[Factory default]
- Set the measurement distance of X-axis from homign operation.
- Set the measurement distance of θ-axis from homign operation.
Description
Description
Description
Description
Description
Transfer Position Data
4
779