Omron FH-3 Series Reference Manual page 375

Setting item
[Factory default]
4 to 64
Size X
[16]
4 to 64
Size Y
[16]
1 to 64
Sampling interval X
[2]
1 to 64
Sampling interval Y
[2]
1 to 32
Comparing interval X
[10]
1 to 32
Comparing interval Y
[10]
• X
(circumferential)
Direction
• Y (radial)
• Diagonal
Note
• Measurement mode
In Precise Defect measurement, the measurement mode depends on the number of registered region figures and
their types. The way to make elements depends on the measurement mode. The relationship between the figure
and measurement mode is as in the table below.
Measurement
Line
mode
Line mode:
• The direction parallel to the measurement region straight line is the X axis and the direction perpendicular is the
Y axis. The shape of elements is rectangular. The element width and length are the number of pixels specified
with the element size X and Y.
Wide circle and arc mode:
• The circumferential direction along the measurement region wide circle (arc) is the X axis and the radial
direction is the Y axis. The shape of elements is fan-shaped. If the circumference length of the wide circle (arc)
of the measurement region is set to N, the element circumferential direction width is 360 degrees × the element
size X / N. The element radial direction width is the number of pixels specified with the element size Y. The
element circumferential direction width is defined as an angle, so the closer the element to the outer
circumference, the larger the element.
Region mode:
• The direction parallel to the measurement region is the X axis and the direction perpendicular is the Y axis. The
shape of elements is rectangular. The element width and length are the number of pixels specified with the
element size X and Y.
FH/FZ5 Processing Item Function Reference Manual
Set value
Specify the X-axis size of defects/contamination to be detected. The higher
this value, the higher the degree of defects for large defects. Specify in units
of pixels.
Specify the Y-axis size of defects/contamination to be detected. The higher
this value, the higher the degree of defects for large defects. Specify in units
of pixels.
Specify the interval for creating elements along the X axis. The smaller this
value, the greater the defect detection performance, but the slower the
processing speed. Specify in units of pixels.
Specify the interval for creating elements along the Y axis. The smaller this
value, the greater the defect detection performance, but the slower the
processing speed. Specify in units of pixels.
Set the number of neighboring elements compared with when the degree of
defect is calculated, For example, if the sampling interval X is set to 4 and the
comparing interval X is set to 2, comparison is with separate elements of 4 ×
2 = 8 pixels along the X axis.
This sets the number of neighboring elements compared with when the
degree of defect is calculated, For example, if the sampling interval Y is set to
4 and the comparing interval Y is set to 2, comparison is with separate
elements of 4 × 2 = 8 pixels along the Y axis.
Set the direction for detecting defects.
The smaller the direction setting count, the shorter the processing time.
Line Circumference Arc
Wide circle Wide circle
and arc and arc
Description
Single figure
Ellipse Rectangle
Region Region
Multiple
figures
Polygon
Region Region
Precise Defect
2
373