↓
PRG>6>1[2/7]
PID1
0.00
SV1
0.00
PV1
0.00
Err
0.00Hz
MV
/ /
/
PRG>6>1[3/7]
PID2
0.00
SV2
0.00
PV2
0.00
Err
0.00Hz
MV
/ /
/
PRG>6>1[4/7]
Ext.PID1 summary
0.00
ESVF
0.00
EPVF
0.00
Err
0.00
EMV1
%
Disable
Mode:
/ /
/
PRG>6>1[5/7]
Ext.PID1
0.00
ESV1
0.00
EPV1
0.00
Err
0.00
EMV1
%
/ /
/
PRG>6>1[6/7]
Ext.PID2
0.00
ESV2
0.00
ESV2
0.00
Err
0.00
EMV2
%
Disable
Mode:
/ /
/
←
PID1 information
←
PID2 information
The table below shows the indication for the PID mode.
Indication
Disable
PID control disabled
Pause
PID control on standby
Cancel
PID control being canceled
Boost
Under application of pressure due to slow flowrate
Sleep
Stopped due to slow flowrate
Alarm
PID alarm ON
Operating
Running under PID control
Ch.1
PID channel 1 under control
PID channel 2 under control (Deviation on channel
Ch.1/Ch.2 Err
2)
Ch.2
PID channel 2 under control
←
External PID (final) information
←
External PID 1 information
External PID 2 information
←
5-86
Meaning