Prbgen User Library; Qscvulib User Library; Rpm_Ilimit_Control User Library - Keithley 4200A-SCS Reference Manual

Model 4200A-SCS Parameter Analyzer Reference Manual

PRBGEN user library

The PRBGEN user library provides test modules to initialize the prober, move to the next site or subsite
in the wafer map of the prober, make or break contact between the probes and the wafer, and get the
X position and Y position of the prober. It allows Clarius to control all supported probers in the same
manner. Clarius projects that use PRBGEN work with any prober supported by Keithley Instruments.
The user modules in the PRBGEN user library are provided as actions in Clarius.
PRBGEN user modules
User module
PrChuck
page F-12)
PrInit (on page
F-11)
PrMovNxt
page F-14)
PrSSMovNxt
(on page F-13)

QSCVulib user library

The QSCVulib user library provides a user module to do quasistatic C-V sweeps.
QSCVulib module
User module
meas_qscv

RPM_ILimit_Control user library

The RPM_ILimit_Control user library provides a user module for short-term calibration of the
4225-RPM current clamp. It also provides user modules that support the calibration user module, but
which should not be set individually.
RPM_ILimit_Control user modules
User module
Do_RPM_ILimit_Cal
Get_RPM_ILimit_DAC_Value
isLimitSupported
OpenLimit
Set_RPM_ICompliance
4200A-901-01 Rev. C / February 2017
Clarius action
(on prober-contact
prober-init
(on
prober-move
prober-ss-move
Clarius test
ramprate-
cvsweep
Description
Directs the prober to have the probe pins make contact with the
wafer or separate the pins from the wafer.
Initializes the prober with die size, first coordinate (X and Y),
units (mm or mils), and mode information.
In learn mode, the PrMovNxt command causes the prober to
move to the next site after inking.
In learn mode, the PrSSMovNxt command causes the prober to
move to the next subsite after inking.
Description
This test uses two SMUs with preamplifiers to do a quasistatic C-V
sweep. The 4200-PA Preamplifiers are required because this test
involves sourcing and measuring current in the picoamp range. The
SMUs source current to charge the capacitor and measure the
voltage, time, and discharge current.
Description
Performs a short-term calibration of the I-clamp of properly-
equipped 4225-RPMs.
Do not set individually. This is used by Set_RPM_ICompliance.
Do not set individually. Used by Do_RPM_ILimit_Cal,
Get_RPM_ILimit_DAC_Value, Set_RPM_ICompliance, and
OpenLimit.
Do not set individually.
Do not set individually.
Section 6: Clarius
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