Keithley 4200A-SCS Reference Manual page 427

Section 6: Clarius
DC Current stressing
For current stressing, the maximum number of devices depend on the number of SMUs in the
system. Each SMU can current stress one device. For a system with eight SMUs, up to eight devices
can be current stressed, as shown in the figure below.
Figure 319: EM test: Eight devices being current stressed by eight SMUs
Combined stressing and testing
The following steps summarize an HCI evaluation for the stressing configurations shown in
Voltage stressing
apply to other types of stress-measure studies.
For information about AC stress for wafer level reliability, refer to
page L-1).
Summary of an HCI evaluation:
1. Use the switch matrix to automatically connect the SMUs to device 1.
2. Run pre-stress parametric tests on each device individually in device-number sequence, as
shown in the following figure.
3. Disconnect all devices.
4. Use the switch matrix to automatically connect all devices to SMUs, as determined by the drain
and gate voltages that were specified for each device.
5. Run stress cycle 1, which stresses all of the devices simultaneously, as shown in the following
figure.
6-158
(on page 6-156) and AC Voltage stressing
Figure 320: Pre-stress parametric tests
Figure 321: Stress all devices simultaneously
Model 4200A-SCS Parameter Analyzer Reference Manual
(on page 6-157). Similar operations
Wafer-Level Reliability Testing
4200A-901-01 Rev. C / February 2017
DC
(on