Test Connections To A Probe Card; Typical Cvu Matrix Card Connections - Keithley 4200A-SCS Reference Manual

Model 4200A-SCS Parameter Analyzer Reference Manual

Test connections to a probe card

The 4210-CVU-Prober-Kit includes 3-meter SMA cables and connection accessories to connect the
4210-CVU to a probe card. Refer to the probe kit documentation for a list of the supplied items. The
cables and adapters supplied with the CVU and the probe kit accommodate most connection
requirements.
The next figure shows typical test connections to a probe card. The connections use triaxial female
connectors. The probe kit includes two types of BNC to triaxial adapters. The 7078-TRX-BNC has the
guard connected to the inner shield of the adapter. The 7078-TRX-GND has the guard disconnected.
In most applications, the 7078-TRX-BNC is the preferred adaptor.
The shields of the SMA cables must be connected together and extended as far as possible to the
DUT, as shown in
If the probe card uses BNC (female) connectors, you do not need the BNC-to-triaxial adapters.

Typical CVU matrix card connections

In your project, you can automate the use of a CVU and other instrumentation using a switching
matrix and actions to control the switching. When the project is run, the switching matrix automatically
makes the required instrument connections for each test in the project.
The next figures show typical connections for a switch system using a Series 700 Switching System
with the 7174A Matrix Card installed.
You can also use the 7072 Matrix Card for C-V testing. However, you must use rows G and H and
local (2-wire) sensing.
4200A-901-01 Rev. C / February 2017
Figure 83: Typical connections to a probe card
Typical 4210-CVU test connections to a DUT
Section 4: Multi-frequency capacitance-voltage unit
(on page 4-6).
4-7