Keithley 4200-SCS Reference Manual page 1409

Model 4200-SCS Reference Manual
Capacitance measurement tests
The Model 4200-SCS provides the following user modules to perform C-V tests using the HP
Model 4284A/4980A:
Details on the user modules for the HP Model 4284A/4980A are provided in the
Library Reference
NOTE:
For details on Model 4284A/4980A connections, see the HP Model 4284A/4980A Operation
Manual.
Connections
Signal connections
Basic 4-wire signal connections for the Model 4284A/4980A are shown in
conductors of the BNC connectors are connected to the DUT. The outer shield of one of the
coaxial cables is typically connected to a Faraday shield. The Model 4284A/4980A output is
typically connected to the wafer backside (or well). The input is typically connected to the gate of a
MOS-C.
Figure D-2
Basic 4284A/4980A connections to DUT
Triax connections
Adapters are required to connect the Model 4284A/4980A to equipment (for example, probe
station, test fixture, matrix card) that uses triax connectors.
4200-901-01 Rev. S / May 2017
• CvSweep4284: C-V sweep test: Performs a capacitance and conductance measurement
at each step of a user-configured linear voltage sweep.
• Cmeas590: C measurement: Performs a capacitance and conductance measurement at a
fixed bias voltage.
later in this section.
If desired, OPEN and SHORT correction can initially be performed on the Model
4284A/4980A to achieve the most accurate C-V measurements. See the HP Model
4284A/4980A Operation Manual for details.
Return to
Appendix D: Using an HP 4285A/4980A LCR Meter
Section Topics
hp4284ulib User
Figure D-2. The center
D-3