Keithley 4200-SCS Reference Manual page 1560

Semiconductor characterization system
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Appendix I: Micromanipulator 8860 Prober
Figure I-38
Setup Options window
5.
Click Set X, Y die size button located in the Setup Options window. The Set X, Y Die size
dialog box opens.
6.
Set X, Y Die size button.
7.
If die size is known, enter it. If not known, calculate (see
following text).
Calculating die sizes
1.
Place pins over pads in upper left corner of wafer (although the upper left corner die is used
in this example, any die may be selected as a base point).
2.
Click Set Base Pt.
3.
Move over and down a known number of die, enter these values into Column moved
(columns) and Row moved (rows).
4.
Click the Set 2nd Pt button.
5.
Check the Copy Die Size to Index button.
6.
Click the Calculate Die Size button.
7.
This determines the accurate die size. To complete, click Done (the grayed out button will
turn active after the calculation is completed).
8.
Click the Set Reference Die button located in the Setup Options window
Set Reference dialog box opens.
Figure I-39
Set Reference Die button
9.
Move the pins over the pads of the die desired to be set as reference die.
10.
Zero out the X/Y, Column, and Row (click Zero X,Y button and Zero C,R).
NOTE:
11.
Click Done.
I-20
If you want the columns and rows to be something other than 0,0 (1,1 for instance),
edit values in Set Reference dialog box as desired before clicking the Done button.
Return to
Section Topics
Model 4200-SCS Reference Manual
Calculating die sizes
in the
(Figure
4200-901-01 Rev. S / May 2017
I-39). The

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