Keithley 4200-SCS Reference Manual page 1572

Appendix J: Using a Manual or Fake Prober
Required probe station software
The Keithley Instruments Model 4200-SCS provides all software required for both manual or fake
prober operation; no additional software is needed.
Probe station configuration
Since remote control (of the prober) is disabled when using manual or fake probers, the probe
station must be manually controlled. The user is also responsible for the prober station set-up.
Manual prober overview
Use the MANL prober to test without utilizing automatic prober functionality. Configuring the
environment for a MANL prober replaces all computer control of the prober with that of the
operator, while allowing the user to step through each command in the sequence. At each prober
command, a dialog box will appear instructing the operator what operation is required.
The following describes the probing sequence using the MANL prober:
1. A project is started.
2. A PrInit command is issued to tell the user to initialize the prober; the PrInit dialog opens.
3. The user continues by selecting OK.
Figure J-1
Prober Action Required dialog: OK initialization
4. The project sets up the measurement system to test the first site.
5. A PrChuck command is issued to tell the user to ensure the first test site is ready for
testing. The PrChuck dialog opens
Figure J-2
Prober Action Required dialog: Move chuck
6. Tests on the site are executed.
7. A PrMovNxt command is issued to tell the user to move to the next site to be tested on the
wafer. The PrMovNxt dialog opens
J-2
(Figure
(Figure
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Model 4200-SCS Reference Manual
Using a Manual or Fake Prober
J-1); the user continues by selecting OK.
J-13); the user continues by selecting OK.
4200-901-01 Rev. S / May 2017
Appendix J