Connection Compensation - Keithley 4200-SCS Reference Manual

Semiconductor characterization system
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Section 15: Multi-Frequency C-V measurements (4210-CVU)

Connection compensation

Offset and gain errors caused by the connections between the 4210-CVU and the device under
test (DUT) can be corrected by using Connection Compensation. Correction is a two-part process:
1.
Connection compensation data is generated for open, short, and load conditions. The
compensation values are stored in tables.
2.
The correction values for open, load, and short must be enabled before running the ITM.
When an ITM is run, each measurement will factor in the enabled compensation values. If open,
short and load compensation are disabled, the compensation values will not be used by the ITM.
NOTE
Guidelines to determine required correction
It is good practice to perform compensation for all three connection conditions (open, short, and
load), but may not be necessary. Use the following general guidelines to determine which
correction needs to be performed:
Open correction
Short correction
Load correction
Connections for connection compensation
The connections for Open is shown in
HPOT must be connected together, and LCUR and LPOT must be connected together. Also, the
shields of the four SMA cables must be connected together as close as possible to the DUT.
Figure 15-18
Connections for Open connection compensation
15-18
Connection compensation should be performed anytime the connection setup is
changed or disturbed. Changes in temperature or humidity do not affect connection
compensation.
Offset correction for small capacitance (>1 M Ω, large impedance)
Offset correction for large capacitance (<10 Ω, small impedance)
Resistive load correction for gain error
Open
Return to
Figure
15-18. For remote (4-wire) sensing, HCUR and
Open
Section Topics
Model 4200-SCS Reference Manual
4200-901-01 Rev. S / May 2017

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