Keithley 4200-SCS Reference Manual page 1598

Appendix K: Cascade Summit-12000 Prober
Figure K-31
Motion Control window
2. From the Motion Control window, click the Chuck to front button
Figure K-32
Chuck to front button
3. From the Nucleus toolbar
Figure K-33
Enable Joystick button
4. Place a wafer on chuck.
5. From the Nucleus UI toolbar, toggle the vacuum from OFF to ON
K-18
(Figure K-30), click the Enable Joystick button
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Model 4200-SCS Reference Manual
(Figure K-32).
(Figure K-33).
(Figure K-34).
4200-901-01 Rev. S / May 2017