Keithley 4200-SCS Reference Manual page 1652

Semiconductor characterization system
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Appendix M: WLR Testing
Figure M-11
qbd_rmpv User Module (default parameters)
Input Variables
hi_pin
lo_pin1,lo_pin2,
lo_pin3
NOTE:
HiSMUId
LoSMUId1, 2, 3
v_use
M-10
(int) High pin (usually the gate pin) (-1 to 72).
(int) Low pins (enter -1 to not connect). low_pin 1, 2, and 3 are usually for
source drain and substrate connection. Depending on device structure,
some of those pins are optional.
If there is no switching matrix in the system, enter either 0 or -1 for hi_pin and
lo_pins to bypass switch.
(char *) ID string of the SMU outputting the stress.
(char *) ID string of the SMU connected to ground terminal. These three
IDs can be same.
(double) Oxide voltage (V) under normal operating conditions. Typically
the power supply voltage of the process. This voltage is used to measure
pre- and post-voltage ramp oxide current (Ref. JESD35-A).
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Model 4200-SCS Reference Manual
4200-901-01 Rev. S / May 2017

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