Keithley 4200-SCS Reference Manual page 1522

Appendix H: Suss MicroTec PA-200 Prober
5. Enter wafer geometry
• Enter values.
• Click Apply.
• Click OK.
Figure H-14
Wafer Edit dialog
6. Select Coordinates from the Configure pull-down
Figure H-15
Configure pull-down
7. From the Coordinate System dialog box, set Origin as shown (set any initial X and Y
Coordinates, see
Figure H-16
Coordinate System dialog box
8. Click OK.
NOTE:
H-14
(Figure
Figure H-16).
Refer to the probesites and probesubsites KITE project examples for specifics on
selecting sites to probe.
Return to
H-14).
(Figure
Section Topics
Model 4200-SCS Reference Manual
H-15).
4200-901-01 Rev. S / May 2017