Keithley 4200-SCS Reference Manual page 1555

Semiconductor characterization system
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Model 4200-SCS Reference Manual
Figure I-27
Set Z-height
Down (contact)
Position Plane
NOTE:
19.
Figure I-28
Align wafer button
4200-901-01 Rev. S / May 2017
Note
This part of the procedure aligns the wafer.
Click the align wafer button
Prb8860 Alignment window will open
Return to
Probe Needles
Manipulators
Sample values (600.00 and 300.00) are for illustrative
purposes only, use desired values for Up and Down. Keep in
mind, the down value (contact) will be greater than the Up value
(non-contact).
(Figure
I-28) on the Tools panel of the pcNav window. The
(Figure
I-29).
Section Topics
Appendix I: Micromanipulator 8860 Prober
Dial:
-Raises platen
(to non-contact position)
Emergency
-Lowers platen
Stop
(to contact position)
UP (non-contact)
Position Plane
Wafer
I-15

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