Keithley 4200-SCS Reference Manual page 1624

Appendix L: Signatone CM500 Prober
For the wafermap:
a. To set HOME on wafermap, press the Edit wafermap icon on toolbar.
Figure L-17
CM500 Prober Editmap function icon
b. Select the Set Home of Map function
c. Click the Home die on wafermap that needs to be set as Home. Then Close the Edit
Figure L-18
CM500 Prober Edit Map Function window
12. If an edge sense card is being used as the contact input for Z Chuck, the user must select
the Setup SoftZ Contact option from the Setup menu.
Figure L-19
CM500 Prober Setup softz contact command
L-10
map function window.
Return to
(Figure L-18).
Section Topics
Model 4200-SCS Reference Manual
4200-901-01 Rev. S / May 2017