Keithley 4200-SCS Reference Manual page 1595

Semiconductor characterization system
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Model 4200-SCS Reference Manual
21.
Figure K-25
Save Wafer Map
Step 3. Create a site definition and define a probe list
NOTE:
Creating a site definition for single subsite per die involves using the software to create a selection
of dies to probe. If a single subsite per die is to be probed, refer to
example
using the software to create a selection of dies to probe, but also includes creating a selection of
the subsites on each die that will be probed. If multiple subsites per die will be probed, refer to
Probesubsites KITE Project example
To open a previously defined and saved site definition and a probe list:
1.
Figure K-26
Nucleus UI icon
4200-901-01 Rev. S / May 2017
Save the Wafer Map settings
The following setup procedure is accomplished using Nucleus UI on probe station
PC.
later in this appendix. Creating a site definition for multiple subsites per die also involves
If the Nucleus toolbar is not already open, double-click the Nucleus UI icon on the
Windows desktop
(Figure
Return to
(Figure
K-25).
later in this appendix.
K-26).
Section Topics
Appendix K: Cascade Summit-12000 Prober
Probesites KITE Project
K-15

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