Keithley 4200-SCS Reference Manual page 1593

Semiconductor characterization system
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Model 4200-SCS Reference Manual
Figure K-21
Step 3: Wafer Map Wizard
12.
13.
Figure K-22
Step 4: Wafer Map Wizard
14.
15.
16.
17.
4200-901-01 Rev. S / May 2017
Click Next.
Select the die position. Optionally, check the Show Partial Die box
Click Next.
Set the reference position
Enter positive X and Y value directions (this defines the coordinate). For example, setting
Define Positive X: Right, and Define Positive Y: Up would define the coordinate as
Quadrant I, while setting Define Positive X: Right, and Define Positive Y: Down would
define the coordinate as Quadrant IV.
Click Mark Test Sites.
Return to
(Figure
K-23).
Section Topics
Appendix K: Cascade Summit-12000 Prober
(Figure
K-22).
K-13

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