Keithley 4200-SCS Reference Manual page 1621

Model 4200-SCS Reference Manual
3.
Figure L-9
CM500 Chuck Setup Sheet
4.
Figure L-10
CM500 Prober wafermap
4200-901-01 Rev. S / May 2017
Select the Chuck Setup tab to enter Z chuck information such as Z travel and overdrive
distance.
After selecting OK, a new wafermap will show on the screen.
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Appendix L: Signatone CM500 Prober
L-7