Keithley 4200-SCS Reference Manual page 1636

Semiconductor characterization system
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Appendix L: Signatone CM500 Prober
9.
Select PrChuck under User Modules and set the chuck_position value to 0. This will
move the Z Chuck to DOWN (separate) position.
Figure L-44
Set Chuck Down
10.
Create a subsite and a device plan.
11.
Add a new UTM named Prober Contact and set the chuck_position value to 1. This will
move the ZChuck to CONTACT position.
Figure L-45
Set Probe Contact
12.
Add a new ITM for device testing.
L-22
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Model 4200-SCS Reference Manual
4200-901-01 Rev. S / May 2017

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