Keithley 4200-SCS Reference Manual page 1625

Semiconductor characterization system
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Model 4200-SCS Reference Manual
13.
Figure L-20
CM500 Prober Setup Edgesense Contact Position window
14.
Figure L-21
CM500 Prober Z Chuck Up (CONTACT) icon
4200-901-01 Rev. S / May 2017
Follow the instructions on the window
determine the contact position of Z Chuck.
After completing the steps in Figure 20, move Z Chuck up to confirm contact condition using
the Contact icon on toolbar
Return to
(Figure
L-20) to adjust the height of platen and to
(Figure
L-21).
Section Topics
Appendix L: Signatone CM500 Prober
L-11

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