Keithley 4200-SCS Reference Manual page 1527

Model 4200-SCS Reference Manual
Figure H-24
Aligning the wafer: Step b.
Step b1.
Step b3.
Step c. Aligning the wafer
Confirm that the ta alignment is correct (the alignment procedure is repeated)
check, manually use the joystick to move the chuck in index moves and confirm that the pins and
pads are aligned.
Figure H-25
Aligning the wafer: Step c.
4200-901-01 Rev. S / May 2017
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Appendix H: Suss MicroTec PA-200 Prober
Step b2.
(Figure H-25). To
H-19