Keithley 4200-SCS Reference Manual page 1528

Appendix H: Suss MicroTec PA-200 Prober
Step d. Aligning the wafer
If the ta alignment is not correct, repeat the four alignment steps in step 1. If the ta alignment is
correct, click Finish
1. Launch the navigator from the ProberBench NT window icon.
2. In the Chuck Navigator window, use the chuck up and down arrows to make contact with the
wafer on the desired home die and home subsite
Figure H-26
Chuck navigator window: wafer height
3. Click the Set-Z button
Figure H-27
Set Chuck Heights
H-20
(Figure H-24, Step 2c).
Set Z
(Figure H-26). The Set Chuck Height window appears
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Model 4200-SCS Reference Manual
(Figure H-26).
Chuck Up
Chuck Down
4200-901-01 Rev. S / May 2017
(Figure H-27).