Keithley 4200-SCS Reference Manual page 1602

Appendix K: Cascade Summit-12000 Prober
• Click No when the alignment is correct.
15. Set the contact position (set the current Z as contact position):
NOTE:
NOTE:
• Either using the Z Up / Z Down buttons on the Motion Control window
• When probe tips are making good contact with the wafer, right click on the Contact
• Click the Set to Current Position button
CAUTION
• The Up / Down arrows may be used to set Z contact. When using the arrows, travel is
• When setting the Z contact, the camera stays focused on the probe needles (not on the
Figure K-43
Set to Current Position button
K-22
The Z contact position is the specified point where probe needles make contact
with the wafer when using the Raise / Lower button. The Raise / Lower button is
located on the left-hand side of the Nucleus toolbar. Click the button to toggle to the
make-contact or break-contact position.
Good contact occurs when the probe tips make contact with the probe pad
accounting for the tolerances of the probe needles and wafer plus any additional
overdrive. Overdrive is the additional Z motion of the probe needles relative to the
wafer after the initial contact. Overdrive ensures tolerable contact resistance by
causing the probe tips to scrub through test pad surface oxide.
the joystick if set for Scan Z Axis (see CAUTION), make contact with the wafer.
button.
When the Joystick mode is set to "Scan Z Axis," the joystick will control Z
movement (see the Mode drop-box in
prober beeps providing an audible alert. When this alert is heard, care
should be exercised when using the joystick for Z travel adjustments.
Avoid damage to the probe needle or the wafer while changing the Z
height.
fast (coarse adjustment) when away from the Z contact position, and slow (fine
adjustment) when close to the Z contact position.
wafer).
Return to
(Figure
Figure
Section Topics
Model 4200-SCS Reference Manual
(Figure
K-43).
K-31). While in this mode, the
4200-901-01 Rev. S / May 2017
K-31), or