Keithley 4200-SCS Reference Manual page 1658

Appendix M: WLR Testing
F
t_step
exit_volt_mult
I_max
q_max
area
V_size, I_size,
T_size, q_size
Output variables:
*V_stress
*I_stress
*T_stress
*q_stress
*Q_bd
*q_bd
*v_bd
*I_bd
*t_bd
*failure_mode (int *)
*test_status (int *)
NOTE:
M-16
(double) Current multiplier between two successive current steps
(Ref. JESD35-A).
(init) Current ramp step time (s) (Ref. JESD35-A).
(double) Multiplier factor of successive voltage measurements. When the
next measured voltage is below this factor multiplying the previous
measured voltage, oxide is considered to be at breakdown and the test
will exit. Typical value 0.85.
(double) Maximum ramp current (A) (Ref. JESD35-A).
(double) Maximum accumulated oxide charge per oxide area. Used to
terminate a test where breakdown occurs but was not detected during the
test (C/cm^2) (Ref. JESD35-A).
(double) area of oxide structure (cm
(int) Size of data array. Maximum 65535.
(double *) Voltage stress array.
(double *) Measured current array.
(double *) Time stamp array indicating when current is measured.
(double *) Accumulated charge array.
(double *) Charge-to-breakdown. Cumulative charge (C) passing through
the oxide prior to breakdown (Ref. JESD35-A).
(double *) Charge-to-breakdown density (C/cm^2) (Ref. JESD35-A).
(double *) Applied voltage at the step just before oxide breakdown (Ref.
JESD35-A).
(double *) Measured current at v_bd, just before oxide breakdown.
(double *) Time stamp when measuring I_bd.
1 Initial test failure.
2 Catastrophic failure (initial test pass, ramp test fail, post test fail).
3 Masked Catastrophic (initial test pass, ramp test pass, post test fail).
4 Non-Catastrophic (initial test pass, ramp test fail, post test pass).
5 Others (initial test pass, ramp test pass, post test pass).
0 No errors (exit due to measured voltage < factor of the previous value).
-1 Failed pre-stress test.
-2 Cumulative charge limit reached.
-3 Maximum time limit reached.
-4 Masked Catastrophic Failure.
-5 Non-Catastrophic Failure.
-6 Invalid specified t_step.
Invalid Test Result - Result = 1e21.
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4200-901-01 Rev. S / May 2017