Keithley 4200-SCS Reference Manual page 1651

Model 4200-SCS Reference Manual
V-ramp and J-ramp tests
The V-Ramp test starts at the use-condition voltage (or lower) and ramps linearly from this value
until oxide breakdown. The J-Ramp starts at a low current and ramps exponentially until oxide
breakdown.
V-ramp test: qbd_rmpv User Module
The V-ramp test is performed by the Ramp-V UTM in the Qbd Project Plan
uses the qbd_rmpv User Module of the wlrlib User Library and is documented as follows:
User Module description
Performs a Charge-to-Breakdown test using the QBD V-ramp test algorithm described in
JESD35-A Procedure for Wafer Level Testing of Thin Dielectrics." This algorithm forces a linear
voltage ramp until the oxide layer breaks down. This algorithm has a maximum voltage of
±200 volts. The flow diagram for the V-ramp test is shown in .
Figure M-11
Syntax
status =
Technique
See JEDEC standard JESD35-A
DIELECTRICS:
NOTE:
4200-901-01 Rev. S / May 2017
shows the default parameters for the qbd_rmpv User Module.
qbd_rmpv(int hi_pin, int lo_pin1, int lo_pin2, int lo_pin3, char *HiSMUId, char
*LoSMUId1, char *LoSMUId2, char *LoSMUId3, double v_use, double I_init, int
hold_time, double v_start, double v_step, int t_step, int measure_delay, double
I_crit, double I_box, double I_max, double exit_curr_mult, double exit_slope_mult,
double q_max, double t_max, double v_max, double area, int exit_mode, double
*V_stess, int V_size, double *I_stress, int I_size, double *T_stress, int T_size,
double *q_stress, int q_size, double *I_use_pre, double *I_use_post, double
*Q_bd, double *q_bd, double *v_bd, double *I_bd, double *t_bd, double *v_crit,
double *v_box, int *failure_mode, int *test_status);
at the beginning of this appendix.
Some of the descriptions of the following Input Variables and Output Variables are
quoted from the JESD35-A standard. The variables quoted from the standard
include this reference identification: (Ref. JESD35-A).
Return to Section Topics
PROCEDURE FOR WAFER-LEVEL-TESTING OF THIN
Appendix M: WLR Testing
(Figure M-9). This test
M-9