Keithley 4200-SCS Reference Manual page 1524

Semiconductor characterization system
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Appendix H: Suss MicroTec PA-200 Prober
2.
From the ProberBench NT window, select WaferMap file
Figure H-19
ProberBench NT window
3.
From the WaferMap window, select and open the desired file.
Step 4. Load, align, and contact the wafer
NOTE:
1.
From the WaferMap Chuck pull-down, select Load Position
the chuck to the front of the prober.
Figure H-20
Chuck pull-down
H-16
The following procedure is accomplished using ProberBench NT computer.
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Model 4200-SCS Reference Manual
(Figure
H-19).
(Figure
H-20). This will bring
4200-901-01 Rev. S / May 2017

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