Keithley 4200-SCS Reference Manual page 1626

Semiconductor characterization system
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Appendix L: Signatone CM500 Prober
15.
If the edge sense is plugged in for contact input, turn ON SoftZ. A red LED will appear in the
motion control panel (See
Figure L-22
CM500 Prober Motion Control Panel
16.
Move Z Chuck down using the Separate icon on toolbar.
Figure L-23
CM500 Prober Z Chuck Down (SEPARATE) icon
Step 4. Set up programmed sites and subsites
Case 1: Programmed sites without subsite setup
1.
Pick the Program Site icon on toolbar
Figure L-24
CM500 Prober Edit Program Sites icon
L-12
Figure
L-22).
(Figure
Return to
Section Topics
Model 4200-SCS Reference Manual
L-24).
4200-901-01 Rev. S / May 2017

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