Keithley 4200-SCS Reference Manual page 1650

Semiconductor characterization system
Hide thumbs Also See for 4200-SCS:
Table of Contents

Advertisement

Appendix M: WLR Testing
4.
Select the Output Values to be exported to the Subsite Data sheet for inter-stressing
monitoring. The window to select Output Values is opened by clicking the Output Values
button in the Definition tab for the ITM or UTM. An Output Value is selected by clicking a
checkbox to insert a √. For details, see
Section 6.
5.
If desired, Exit Conditions for an ITM can be set. When an exit condition other than None
is selected and the source for the ITM goes into compliance, the test, device plan, subsite
plan, site, or project will terminate. None is the default exit condition. The window to set the
exit condition is opened by clicking the Exit Conditions button in the Definition tab of the
ITM. For details, see
6.
Save the project plan by selecting Save All from the File menu (at the top of the KITE
window). You can also save the project by clicking the Save All button on the toolbar.
7.
Repeat steps 2 through 6 for adding more tests for the same device.
8.
Repeat steps 1 through 7 for adding more devices to the subsite plan.
9.
Configure the subsite for subsite cycling (Stress/Measure Mode: In the Project Navigator,
double-click the subsite plan and select the Subsite Setup tab to configure subsite cycling.
a. Set the Stress/Measure Mode cycle times for the subsite plan: The Stress/Measure
b. Configure the stress properties and connection information for every device in the
See
Figure M-10
Process flow: HCI/NBTI/constant current EM
M-8
ITM compliance exit conditions
Mode and cycle times are set from the Subsite Setup tab.
subsite plan: In the Subsite Setup tab, click the Device Stress Properties tab to open
the properties window.
Subsite cycling
in Section 6. for detailed information on subsite cycling.
hara teri ati n
n rea e
tre
ti e
Return to
ITM Output Values
re tre
e
Fail
e
r
ata
tre
e
Fail
nteri
te t
e
r
ata
e
Fail xit
Section Topics
Model 4200-SCS Reference Manual
and
UTM Output Values
in Section 6.
t
4200-901-01 Rev. S / May 2017
in

Advertisement

Table of Contents
loading

Table of Contents