Keithley 4200-SCS Reference Manual page 1553

Semiconductor characterization system
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Model 4200-SCS Reference Manual
Figure I-22
Load Wafer button
Figure I-23
Load Wafer window
11.
12.
13.
14.
15.
16.
4200-901-01 Rev. S / May 2017
Load Wafer Button
Click the SET Z UP/DN button on pcNav window
Ovd window will open
(Figure
Using the Dial, bring the platen to a positive Z-height (this height in the example is 600).
This will be a non-contact position with the pads in focus but without the pins touching the
pads
(Figure
I-27).
Use the manual Z-dial to lower the platen to make initial contact with pads (this assumes
that the pins are planar).
Click the Set Down button when all pins are in contact with their respective pad.
Use the Dial to move the pins to a non-contact position (this height in the example is 300).
Click the Set UP button.
Return to
I-25).
Section Topics
Appendix I: Micromanipulator 8860 Prober
(Figure
I-24). The SET Prb8860 Up/Down/
I-13

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