Keithley 4200-SCS Reference Manual page 1672

Appendix N: Additional User Libraries
INPUTS:
x
y
start_index
npts
OUTPUTS:
a
b
r
qbd_rmpv and qbd_rmpj modules
User module descriptions
qbd_rmpv
qbd_rmp
NOTE:
Hotchuck_Triotek user library reference
The user module in the Hotchuck_Triotek user library is used to control the temperature of the
Triotek hot chuck. This user module is summarized in
follows the table.
Table N-3
Hotchuck_Triotek user module
User module
SetChuckTemp
SetChuckTemp user module
User module description
The SetChuckTemp routine is used to configure the TrioTech hot chuck to reach a desired
temperature. The temperature controller that controls that hot chuck is TC1000. The
SetChuckTemp user module is shown in
N-12
(double *) Array of x-data.
(double *) Array of y-data.
(int) Starting index value.
(int) Number of data points.
(double *) Calculated slope.
(double *) Calculated y-intercept.
(double *) Correlation coefficient.
This routing performs a Charge-to-Breakdown test using the QBD V-ramp test
algorithm described in JESD35-A Procedure for Wafer Level Testing of Thin
Dielectrics." This algorithm forces a linear voltage ramp until the oxide layer
breaks down.
This routine performs a Charge-to-Breakdown test using the QBD J-ramp test
algorithm described in JESD35-A "Procedure for Wafer Level Testing of Thin
Dielectrics." This algorithm forces a logarithmic current ramp until the oxide
layer breaks down.
These user modules are documented in
J-ramp test: qbd_rmpj User
Return to
V-ramp test: qbd_rmpv User Module
Module.
Table
Description
Sets the temperature of the Triotek hot chuck.
Figure N-8.
Section Topics
Model 4200-SCS Reference Manual
N-3. Details for the user module
4200-901-01 Rev. S / May 2017
and