Keithley 4200-SCS Reference Manual page 1654

Semiconductor characterization system
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Appendix M: WLR Testing
V_size, I_size,
T_size, q_size
Output Variables
*V_stress
*I_stress
*T_stress
*q_stress
*I_use_pre
*I_use_post
*Q_bd
*q_bd
*v_bd
*I_bd
*t_bd
*v_cri
*v_box
*failure_mode (int *)
*test_status (int *)
M-12
Because of noise considerations, the calculated failure current criteria is
used only when the measured current is 10X the user specified noise
current. For measured currents below this value, the fail_current is used
as the exit criteria.
Size of data array. Maximum 65535.
(double *) Voltage stress array.
(double *) Measured current array.
(double *) Time stamp array indicating when current is measured.
(double *) Accumulated charge array.
(double *) Measured oxide current at v_use, prior to starting the ramp
(Ref. JESD35-A).
(double *) Measured oxide current at v_use, after the ramp finished (Ref.
JESD35-A).
(double *) Charge-to-breakdown. Cumulative charge passing through the
oxide prior to breakdown (C) (Ref. JESD35-A).
(double *) Charge-to-breakdown density (C/cm^2) (Ref. JESD35-A).
(double *) Applied voltage at the step just before oxide breakdown (Ref.
JESD35-A).
(double *) Measured current at v_bd, just before oxide breakdown.
(double *) Time stamp when measuring I_bd.
(double *) Applied voltage at the step when the oxide current exceeds
I_crit (Ref. JESD35-A).
(double *) Applied voltage at the step when the oxide current exceeds
I_box (Ref. JESD35-A).
1
Initial test failure.
2
Catastrophic failure (initial test pass, ramp test fail, post test fail).
3
Masked Catastrophic (initial test pass, ramp test pass, post test fail).
4
Non-Catastrophic (initial test pass, ramp test fail, post test pass).
5
Others (initial test pass, ramp test pass, post test pass).
2
No test errors (exit due to measured current > a factor of the previous
measurement).
1
No test errors (exit due to measured current slope > a factor of the
previous slope).
0
No test errors (exit due to measured current > fail_current ONLY).
-1
Failed pre-stress test.
-2
Cumulative charge limit reached.
-3
Voltage limit reached.
-4
Maximum time limit reached.
-5
Masked Catastrophic Failure.
-6
Non-Catastrophic Failure.
-7
Invalid specified t_step, hold_time, or measure_delay.
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Model 4200-SCS Reference Manual
4200-901-01 Rev. S / May 2017

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