Keithley 4200-SCS Reference Manual page 1601

Model 4200-SCS Reference Manual
Figure K-41
Hard Align tab
13.
14.
Figure K-42
Center button
NOTE:
4200-901-01 Rev. S / May 2017
On the Hard Align tab:
• Check Start at the center ON.
• Scan method as Wait at end.
• Set desired scan velocity.
• Enter the fixed scan distance or check the Define with Joystick box.
Align the wafer using the following steps:
• Move to wafer center by clicking the Center button
window.
• Click Start Align on the Hard Align dialog.
Raise the platen arm if prompted (a prompt will only appear if the platen arm is
down when you start the alignment).
• Watch on the monitor while the stage moves down the street to position the needles near
the left edge of the wafer.
• Adjust the theta knob on the stage while moving across the wafer.
• Click Yes at the prompt that appears on the screen.
• Watch on the monitor and continue to adjust theta while moving down the street to
position the needles near the right edge of the wafer.
• Make a small adjustment in theta when motion stops.
Return to Section Topics
Appendix K: Cascade Summit-12000 Prober
(Figure K-42) on the Motion Control
K-21