Keithley 4200-SCS Reference Manual page 1622

Semiconductor characterization system
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Appendix L: Signatone CM500 Prober
Step 3. Load, align, and contact the wafer
1.
Press the Load wafer icon on toolbar.
Figure L-11
CM500 Prober load wafer icon
2.
Select Start to move the wafer to Home and begin the sequences of 2 point alignment.
Figure L-12
CM500 Prober 2 Point Alignment 1
3.
Press the Arrow buttons on the window
point 1.
Figure L-13
CM500 Prober manual MOVE buttons
L-8
(Figure
Return to
Section Topics
Model 4200-SCS Reference Manual
L-13) to move the wafer stage to reference
4200-901-01 Rev. S / May 2017

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