Keithley 4200-SCS Reference Manual page 1630

Semiconductor characterization system
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Appendix L: Signatone CM500 Prober
KITE project example for Probe Sites
The following is a step-by-step procedure to properly configure the KITE project to execute testing
and auto wafer stepping to all programmed sites successfully. When the CM500 prober is
connected to the Model 4200-SCS by GPIB interface, Model 4200-SCS is the GPIB master
controller and CM500 is always in listening mode. The Model 4200-SCS will send control
commands to CM500 to move prober to next site during the automatic testing. There are four
interface commands: PrInit, PrChuck, PrMovNxt, and PrSSMovNxt. The user needs to add
these commands into the KITE project.
CM500
NOTE:
Step 1. Follow the Probe Station Configuration Steps 2 to 4 (noted at beginning of this appendix).
KCON
NOTE:
Add a prober to the Model 4200-SCS:
1.
From the Tools menu (on the Keithley CONfiguration utility window), click Add External
Instrument > Probe Station. Select the Probe Station property.
Figure L-33
Keithley KCON Tools
L-16
The following configuration is accomplished using the CM500 on the probe station
PC.
The following configuration is accomplished using the Model 4200-SCS. Use
KCON to add the prober to the configuration.
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Model 4200-SCS Reference Manual
4200-901-01 Rev. S / May 2017

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