Keithley 4200-SCS Reference Manual page 1582

Semiconductor characterization system
Hide thumbs Also See for 4200-SCS:
Table of Contents

Advertisement

Appendix K: Cascade Summit-12000 Prober
Required probe station software
The following program is used to configure and operate the SUMMIT-12000 prober with the
Keithley Instruments Model 4200-SCS:
Nucleus UI: Provides easy access to configuration and help programs.
Software versions
The following software version was used to verify the configuration of the SUMMIT-12000 prober
with the Model 4200-SCS:
Nucleus UI ver. 2.0
Probe station configuration
CAUTION
The general steps required to setup and configure the PA-200 prober for use with the 4200-SCS:
Step 1. Set up communication
Step 2. Set up wafer geometry
Step 3. Create a site definition and define a probe list
Step 4. Load, align, and contact the wafer
Each step is detailed later in this section.
Modifying the prober configuration file
NOTE:
The default prober configuration file is contained in
use with a GPIB communication setup. Use Notepad.exe to open, modify, and save this file
should any change be required.
Configuration file location: C:\S4200\sys\dat\prbcnfg_CC12K.dat.
K-2
Although this appendix provides instructions on prober setup and
configuration, make sure that you are familiar with the Cascade
SUMMIT 12000 Prober and its supporting documentation before
attempting setup, configuration, or operation.
This file is modified using the 4200-SCS computer.
Return to
Figure
Section Topics
Model 4200-SCS Reference Manual
Cascade Summit-12000 Prober
K-1. As shown, the file is configured for
4200-901-01 Rev. S / May 2017
Appendix K

Advertisement

Table of Contents
loading

Table of Contents