Keithley 4200-SCS Reference Manual page 1620

Appendix L: Signatone CM500 Prober
Step 2. Set up wafer geometry
1. Press the Prober Setup icon on toolbar as shown below.
Figure L-7
CM500 Prober Setup icon
2. Select Wafermap Setup tab to setup wafer information such as wafer size, scan distance, X
step size, and Y step size.
Figure L-8
CM500 Prober Setup Sheet
L-6 Return to Section Topics
Model 4200-SCS Reference Manual
4200-901-01 Rev. S / May 2017