Keithley 4200-SCS Reference Manual page 1557

Semiconductor characterization system
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Model 4200-SCS Reference Manual
Figure I-32
Set X, Y Die Size dialog box
Calculating die sizes
1.
2.
3.
4.
5.
6.
This determines the accurate die size. To complete, click Done (the grayed out button will turn active
after the calculation is completed).
7.
Figure I-33
Set Reference Die button
8.
9.
NOTE:
10.
4200-901-01 Rev. S / May 2017
Place pins over pads in upper left corner of wafer (although the upper left corner die is used
in this example, any die may be selected as a base point).
Click Set Base Pt.
Move over and down a known number of die; enter these values into Column moved
(columns) and Row moved (rows).
Click the Set 2nd Pt button.
Check the Copy Die Size to Index button.
Click the Calculate Die Size button.
Click the Set Reference Die button from the pcNav window. The Set Reference dialog box
opens
(Figure
I-34).
Move over the pads of the reference die (reference die is user-selected).
Zero out the X/Y and Column and rows (click Zero X,Y button and Zero C,R).
If you want the columns and rows to be something other than 0,0 (1,1 for instance),
edit values in Set Reference dialog box as desired before clicking the Done button.
Click Done.
Return to
Section Topics
Appendix I: Micromanipulator 8860 Prober
I-17

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