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Appendix I: Micromanipulator 8860 Prober
Figure I-29
Prb8860 Alignment window
20.
Select Ref Axis X in the Prb8860 Alignment window.
21.
Check Auto adjust other devices.
22.
Move prober chuck to extreme left of the wafer. Look through the microscope and Ensure
the pins are over the pads.
23.
Click Set Base Pt.
24.
Move to a die on the extreme right of the wafer.
25.
Use the joystick (low mode) and theta adjustment to align the pins to the same pads as the
first die (both along the same row of die).
26.
Click Set 2nd Pt.
27.
Repeat this process until the Angle (rad) is as close to zero as possible.
28.
When the alignment is complete, click Done.
NOTE:
29.
Set units to either microns or mils from pcNav's Prb8860 window (lower left corner).
Figure I-30
Unit of measure drop-down list box
Click Set X, Y die size button located in the lower middle of the Prb8860 window. The Set
30.
X, Y Die Size dialog box opens. If die size is known, enter it. If not known, calculate (see
Calculating die sizes
Figure I-31
Set X, Y die size button
I-16
This part of the procedure sets units and die size.
in the following text).
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Model 4200-SCS Reference Manual
4200-901-01 Rev. S / May 2017
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