Keithley 4200-SCS Reference Manual page 1616

Appendix L: Signatone CM500 Prober
Required probe station software
NOTE:
Software versions
The following software version was used to verify the configuration of the CM500 prober with the
Model 4200-SCS: CM500.EXE ver. 2.5. For the S460-SE prober: S460SE.EXE ver. 2.5.
Probe station configuration
CAUTION
There are four general steps required to setup and configure the CM500 or S460 prober for use
with the Model 4200-SCS:
• Step 1. Set up communication
• Step 2. Set up wafer geometry
• Step 3. Load, align, and contact the wafer
• Step 4. Set up programmed sites and subsites
Each step is detailed later in this section.
Modifying the prober configuration file
NOTE:
The default prober configuration file is contained in
use with a GPIB communication setup. Use Notepad and Microsoft
modify, and save this file should any change be required.
Configuration file location: C:\S4200\sys\dat\prbcnfg_CM500.dat.
L-2
The CM500 driver with the Keithley Instruments Model 4200-SCS also works with
other Signatone probers with Interlink controller such as the WL250 and S460SE.
The name CM500 used in the configuration and setup in this section applies to all
Signatone semi-auto prober system with Interlink controller.
Although this appendix provides instructions on prober setup and
configuration, refer to the Signatone CM500 or S460 Prober supporting
documentation before attempting setup, configuration, or operation.
This file is modified using the Model 4200-SCS.
Return to
Figure
Section Topics
Model 4200-SCS Reference Manual
Signatone CM500 Prober
L-1. As shown, the file is configured for
® ®
Windows Explorer
4200-901-01 Rev. S / May 2017
Appendix L
®
to open,