Keithley 4200-SCS Reference Manual page 1629

Model 4200-SCS Reference Manual
9.
Figure L-31
CM500 Prober Edit Subsite window
10.
NOTE:
11.
12.
Figure L-32
CM500 Prober Enable Subsite
13.
14.
4200-901-01 Rev. S / May 2017
Select Wafer as the subsite device.
Move the wafer stage (see
All data recorded for the subsite are relative to the corner of the home die. The user
can record the position of the subsite either by keying in the coordinates of the
subsite using the keyboard, or by moving the wafer to the actual position and
pressing Enter.
To step through all the programmed sites and subsites, pick the Run Program Site icon
(see Figure L-27) on the toolbar.
Make sure the Subsite (template) is Enabled
press the To First Site button to move wafer stage to first site of probing lists.
In the File menu bar, select the Save setup As command (see
to hard disk. The user can load this setup next time without going through all the procedures
again.
The Prober is now ready to accept remote command from the S4200.
Return to
Figure L-22) to HOME position first.
(Figure
Section Topics
Appendix L: Signatone CM500 Prober
L-32) if subsites are to be used. Then
Figure L-29) to save the file
L-15