Keithley 4200-SCS Reference Manual page 1543

Model 4200-SCS Reference Manual
Probe station configuration
CAUTION
There are four general steps required to set up and configure the 8860 prober for use with the
Model 4200-SCS:
Step 1. Setting up communication
Step 2. Setting up wafer geometry
Step 3. Creating a site definition and defining a probe list
Step 4. Loading, aligning, and contacting the wafer
Each step is detailed later in this section.
Modifying the prober configuration file
NOTE:
The default prober configuration file is contained in
use with a serial prober setup.
Configuration file location: C:\S4200\sys\dat\prbcnfg_MM40.dat
4200-901-01 Rev. S / May 2017
Although this appendix provides instructions on prober setup and
configuration, ensure that you are familiar with the Micromanipulator 8860
prober and its supporting documentation before attempting setup,
configuration, or operation.
This file is modified using the Model 4200-SCS computer.
Return to Section Topics
Appendix I: Micromanipulator 8860 Prober
Figure I-1. As shown, the file is configured for
I-3